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Teer Coatings Clusterbeam

Clusterbeam Systems

Since 2006, the ClusterGen Max-200 Cluster-beam system has been developed by TeerCoatings to synthesis nano-clusters in gas-phase via magnetron sputtering technology.


When combined with mass filtering technology, the cluster size distribution can be narrowed down to a small range. Over the years, the system has gone through many generations of improvement. Based on intensive research work on aerodynamic modelling and magnetic field modelling, this state-of-art instrument can

produce single-element or alloy clusters with high deposition rates. Whether it’s plate, disk or powder substrate, the system can be tailored to suit your requirement.

Teer Coatings Clusterbeam

Standard Features


  • Broad cluster size range: from single atom to >10 nm in diameter.

  • Narrow size distribution: typically +/- 10% of user selected diameter or better.

  • Wide choice of cluster materials: most metallic elements and selected semiconductor materials.

  • Single Sputtering Source: in addition to single element clusters alloy clusters can also be produced if an alloy target is used.

  • Cooling: the condensation chamber can be cooled by water or liquid Nitrogen

  • Versatile substrate materials and forms: clusters can be deposited onto plates, disks or powders, made of metal, glass, ceramic, polymer, or plastic, etc

  • High deposition rate: > 1 nA beam current for size-selected well-understood clusters, typically 100 ~ 200 pA 
    for normal clusters.

  • Well controlled deposition energy: from soft landing to high energy impact

  • Computer controlled: all functions are controlled via the software interface.

Teer Coating Clusterbeam diagram 1.jpg

Optional Extras


  • Powder Deposition Chamber: allows Cluster deposition 
    onto powders.

  • Multiple Magnetrons: 2 or 3 magnetrons can be integrated into the design allowing multiple targets to be sputtered to form alloy clusters.

  • Nanocomposite material deposition: one magnetron can 
    be added into the deposition Chamber for co-deposition of clusters and thin film at the same time to form nanocomposite materials.

  • UHV: the system can be built to be UHV compatible.

Teer Coating Clusterbeam diagram 2.jpg

Examples of Application Areas

& Research and Development


  • Nano-clusters for biological sensing and imaging

  • Nano-clusters for photonics

  • Nano-clusters for magnetic materials

  • Nano-composite materials

Modular design


  • Cluster aggregation source module

  • Ion-optics module

  • Mass filtering module

  • Deposition module for size-selected clusters

  • Deposition module for non-size-selected clusters
    (eg. Powder deposition unit)

Teer Coating Clusterbeam diagram 3.jpg
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